晶圓代工廠TowerJazz日前宣布的新加坡微電子研究院(IME)擴(kuò)大合作開(kāi)發(fā)8英寸微機(jī)電系統(tǒng)(MEMS)芯片的協(xié)議。雙方合作開(kāi)發(fā)的產(chǎn)品包括慣性傳感器、壓力傳感器以及為第三方MEMS公司開(kāi)發(fā)的硅片集成微反射鏡系統(tǒng)等。TowerJazz 表示，雙方未來(lái)的合作還將擴(kuò)大到硅通孔(TSV)及先進(jìn)封裝、3維芯片集成、光電子和納米電子等領(lǐng)域。

TowerJazz taps Singapore’s IME for MEMS development

Hoping to make micro-electro-mechanical systems (MEMS) applications a better revenue stream for TowerJazz, the specialty foundry has touted a technology partnership with Institute of Microelectronics (IME) of Singapore. The institute is known for gelling fabless or fab-lite companies with R&D programs that can quickly transition to foundries for prototyping and possible production.

“IME’s capabilities and experience as an 8-inch (200mm) technology development site for MEMS and ASICs, combined with TowerJazz’s blend of business and technical competency for MEMS and IC fabrication, creates an advantage for our customers by reducing total project cost and time-to-market,” said Zmira Lavie, VP, Process Engineering R&D and GM of Transfer, Development, and Optimization Process Services Business Unit.

TowerJazz said that the collaboration had already yielded ‘outcomes in the areas of inertial sensors, pressure sensors and micromirrors with MEMS product companies,’ without given specific examples.

In the future, TowerJazz claimed that future collaborations could include through-silicon via (TSV) and advanced packaging, 3-dimensional integrated chips, photonics and nanoelectronics.